Metrology technology for the semiconductor industry

Precise metrology technology for semiconductor production

At this year's Silicon Saxony Day on 17 June in Dresden, senswork will be presenting specialized solutions for quality assurance and automation in wafer production at stand B17. The focus will be on image processing-supported systems that are used in the upstream process steps before exposure and actual chip production - from ingot processing to wafer packaging. senswork combines maximum precision with industrial efficiency.

Wafer production requires precise process control at every stage to ensure a high yield and consistent quality. senswork, an expert in industrial image processing, offers customized inspection systems that detect errors early and in real time, enable predictive maintenance and thus increase both product quality and system availability.

A particular focus is also on retrofit solutions for existing systems: senswork enables the retrofitting of modern image processing technologies in production environments in order to upgrade existing systems economically and future-proof - without interfering with the basic infrastructure.

An overview of senswork's end-to-end solutions for wafer production:

• Ingot Slicing: Camera-supported measuring system for high-precision alignment of wiregate saws - accuracy 0.005 degrees
• Wafer Grinding: AI-based evaluation to detect faulty grinding patterns or tool wear
• Polishing: Fully automated loading and unloading systems for polishing systems in cooperation with our mechanical engineering partners
• FOSB Inspection: 100 percent quality control of FOSBs including attachment part inspection, cross-slot detection and label verification

• Chip Handling (Pre-Packaging): Optical measuring system for precise position detection of die components for exact placement in test adapters

“Our technology supports customers worldwide in ensuring reliable quality standards even in the critical early process steps of wafer production - whether for new systems or by retrofitting existing systems,” explains Rainer Obergrußberger, CEO of senswork. “Precise inspection solutions are a decisive competitive advantage, especially in the dynamic environment of the semiconductor industry.”

Caption 1: Ingot cutting with maximum precision: Our optical measuring system enables the exact alignment of wire frame saws. (Image: senswork)

Caption 2: FOSB inspection in perfection: senswork presents a fully automated 100 percent quality control system including add-on part inspection, cross-slot detection and label verification at the Silicon Saxony Day. (Image: kynny/ istockphoto.com)

Press Contact
Hedwig Unterhitzenberger
+49 8677 409958-37
hedwig.unterhitzenberger@senswork.com
senswork GmbH, Gewerbepark Lindach D 3, 84489 Burghausen